19 July 1996 High-efficiency holographic ion-etched gratings with multilayer coatings and operating on-blaze at normal incidence in the 125- to 300-A range
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Abstract
Multilayer coatings have been applied to holographic diffraction gratings that have ion-etched blazed groove profiles. For each grating, the multilayer coating was designed to match the blaze angle so that the grating had high efficiency near normal incidence and in a wavelength region of choice in the 125-300 angstrom range. The grating efficiencies as functions of wavelength and incidence angle were measured using synchrotron radiation and were compared to the expected results. Normal-incidence efficiencies up to 13 percent were achieved at a wavelength of 128 angstrom. The performance characteristics of multilayer holographic and ruled replica gratings were compared and were related to the shape and roughness of the groove profiles as determined by atomic force microscopy.
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John F. Seely, Michael P. Kowalski, Raymond G. Cruddace, Jack C. Rife, Troy W. Barbee, William R. Hunter, Glenn E. Holland, "High-efficiency holographic ion-etched gratings with multilayer coatings and operating on-blaze at normal incidence in the 125- to 300-A range", Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); doi: 10.1117/12.245088; https://doi.org/10.1117/12.245088
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