19 July 1996 Role of sampling errors in the specification of x-ray mirror surfaces
Author Affiliations +
The effects of topographic finish errors on the quality of the image formed by a simple focusing mirror and the performance of different laboratory roughness-measuring instruments can be described in terms of a common formalism involving statistical operators or 'estimators'. In effect, conventional finish specifications and the test measurements used to ensure compliance with them, are stated in terms of the average values of these estimators. Int his paper we calculate correction factors to be applied to such average- based specifications and test measurements to account for the fluctuation effects inherent in the statistical nature of the processes considered.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugene L. Church, Eugene L. Church, Peter Z. Takacs, Peter Z. Takacs, } "Role of sampling errors in the specification of x-ray mirror surfaces", Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); doi: 10.1117/12.245081; https://doi.org/10.1117/12.245081

Back to Top