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19 July 1996 Surface characterization of an XMM mandrel at the European Synchrotron Radiation Facility: part II
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Abstract
In a previous paper, we described the experimental set-up and requirements used to study an XMM mandrel by x-ray angle-resolved scattering (ARS). We presented first results and compared them to micro-profilometry data. Here we complete the description of the experimental method and the data analysis of the x-ray ARS studies. We point out several pitfalls and propose solutions to avoid them. We emphasize the need to span a wide intensity dynamical range and the importance to separate the intensities form the specular and the scattered beams. This separation is of particular interest for estimating the rms-roughness from the power spectral density, modeled by a power-law of the spatial frequency. We then compare the results for the roughness with those obtained from profiler measurements. In a second part, the figure measurements of the XMM mandrel are described and analyzed in detail. They have been carried out with both an x-ray pencil beam and an optical long trace profiler. In particular, much attention has been given to the determination of the angle between the two sections of the Wolter I optical configuration and to the effect of the mandrel mounting supports. The PSD was completed with the low-frequency results. Finally, the surface data from the earlier experiment on the Ni-coated normally-polished paraboloid and the superpolished hyperboloid were used to predict the image quality of a Wolter I type optics having the same surface characteristics. The influence of different surface finishes on the image point spread function of a grazing incidence mirror is discussed.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Samuel Gougeon, Olivier Hignette, Andreas K. Freund, Ulrich Lienert, Philippe Gondoin, and Daniel de Chambure "Surface characterization of an XMM mandrel at the European Synchrotron Radiation Facility: part II", Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); https://doi.org/10.1117/12.245082
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