31 October 1996 Spectral responsivity of silicon photodiodes: high-accuracy measurement and improved self-calibration in the soft x-ray spectral range
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Abstract
The Physikalisch-Technische Bundesanstalt (PTB) operates a radiometry laboratory at the synchrotron radiation facility BESSY. A beamline for detector calibration provides monochromatic radiation of tunable photon energy, high spectral purity (less than 1% false light contribution) and high radiant power in the photon energy range from 50 eV to 1500 eV. With that source of monochromatic radiation a cryogenic electrical substitution radiometry (ESR) is operated as a primary detector standard, which is capable of measuring radiant power in the order of some (mu) W with a relative uncertainty below 0.2%. The spectral responsivity of silicon photodiodes can be measured with a relative uncertainty of 0.3% by comparison to the ESR. On the other hand, silicon photodiodes have been introduced as easy-to- operate detector standards in the soft x-ray region in the PTB laboratory some years ago. The spectral responsivity of these photodiodes can be determined using a self-calibration technique, which is based on the knowledge of mean electron- hole pair creation energy, w, and the measurement of the angle of incidence dependence of the spectral responsivity. We deduced a constant value of w equals (3.64 plus or minus 0.03) eV for silicon in the soft x-ray region and improved the method to determine the charge collection efficiency of the photodiode. That allows us now to use silicon detectors as detectors of calculation spectral responsivity with a relative uncertainty of about 2%.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Frank Scholze, Frank Scholze, Hans Rabus, Hans Rabus, Gerhard Ulm, Gerhard Ulm, "Spectral responsivity of silicon photodiodes: high-accuracy measurement and improved self-calibration in the soft x-ray spectral range", Proc. SPIE 2808, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VII, (31 October 1996); doi: 10.1117/12.256027; https://doi.org/10.1117/12.256027
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