Piezoresistive microcantilever optimization for uncooled infrared detection technology

Slobodan Rajic; Boyd M. Evans III; Panos G. Datskos; Patrick Ian Oden; Thomas G. Thundat; Charles M. Egert

doi:10.1117/12.255182

21 October 1996 Piezoresistive microcantilever optimization for uncooled infrared detection technology

Slobodan Rajic, Boyd M. Evans III, Panos G. Datskos, Patrick Ian Oden, Thomas G. Thundat, Charles M. Egert

Proceedings Volume 2817, Infrared Spaceborne Remote Sensing IV; (1996) https://doi.org/10.1117/12.255182
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Uncooled infrared sensors are significant in a number of scientific and technological applications. A new approach to uncooled infrared detectors has been developed using piezoresistive microcantilevers coated with thermal energy absorbing material(s). Infrared radiation absorbed by the microcantilever detector can be sensitively detected as changes in the electrical resistance as a function of microcantilever bending. These devices have demonstrated sensitivities comparable to existing uncooled thermal detector technologies. The dynamic range of these devices is extremely large due to measurable resistance change obtained with only nanometer level cantilever displacement. Optimization of geometrical properties for selected commercially available cantilevers is presented. Additionally, we present results obtained from a modeling analysis of the thermal properties of several different microcantilever detector architectures.

Citation Download Citation

Slobodan Rajic, Boyd M. Evans III, Panos G. Datskos, Patrick Ian Oden, Thomas G. Thundat, and Charles M. Egert "Piezoresistive microcantilever optimization for uncooled infrared detection technology", Proc. SPIE 2817, Infrared Spaceborne Remote Sensing IV, (21 October 1996); https://doi.org/10.1117/12.255182

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