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21 October 1996 Piezoresistive microcantilever optimization for uncooled infrared detection technology
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Abstract
Uncooled infrared sensors are significant in a number of scientific and technological applications. A new approach to uncooled infrared detectors has been developed using piezoresistive microcantilevers coated with thermal energy absorbing material(s). Infrared radiation absorbed by the microcantilever detector can be sensitively detected as changes in the electrical resistance as a function of microcantilever bending. These devices have demonstrated sensitivities comparable to existing uncooled thermal detector technologies. The dynamic range of these devices is extremely large due to measurable resistance change obtained with only nanometer level cantilever displacement. Optimization of geometrical properties for selected commercially available cantilevers is presented. Additionally, we present results obtained from a modeling analysis of the thermal properties of several different microcantilever detector architectures.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Slobodan Rajic, Boyd M. Evans III, Panos G. Datskos, Patrick Ian Oden, Thomas G. Thundat, and Charles M. Egert "Piezoresistive microcantilever optimization for uncooled infrared detection technology", Proc. SPIE 2817, Infrared Spaceborne Remote Sensing IV, (21 October 1996); https://doi.org/10.1117/12.255182
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