In the Institute of Optics and Electronics, Chinese Academy of Sciences, a series of deformable mirrors (DM) and fast steering mirrors (FSM), including 19, 21, 37/55, and 61 element deformable mirrors with continuous face plate and discrete PZT actuators and two dimensional fast steering mirrors with different diameters and tip-tilt angles ranging from ten arc sec. to several arc min., has been developed. These mirrors have been successfully used in different adaptive optical systems. In this paper, the specifications such as influence function, deformation-voltage response, frequency response, step response and their measuring methods are reported. Some aspects related to environment of employment such as temperature stability of surface figure are discussed.