21 November 1996 Chemical-vapor-deposited SiC for high heat flux applications
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Important properties and applications of CVD SILICON CARBIDETM with particular emphasis on high heat loads are reviewed. Data on the mechanical and thermal properties of CVD-SiC as function of temperature are presented. Further, the effect of different high temperature treatments on flexural strength of CVD-SiC is discussed and the thermal shock resistance of CVD-SiC is compared to other competing materials. Finally, several high heat flux applications in the areas of optics, semiconductor processing and wear parts are discussed.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jitendra Singh Goela, Michael A. Pickering, Lee E. Burns, "Chemical-vapor-deposited SiC for high heat flux applications", Proc. SPIE 2855, High Heat Flux Engineering III, (21 November 1996); doi: 10.1117/12.259820; https://doi.org/10.1117/12.259820

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