21 November 1996 Chemical-vapor-deposited SiC for high heat flux applications
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Important properties and applications of CVD SILICON CARBIDETM with particular emphasis on high heat loads are reviewed. Data on the mechanical and thermal properties of CVD-SiC as function of temperature are presented. Further, the effect of different high temperature treatments on flexural strength of CVD-SiC is discussed and the thermal shock resistance of CVD-SiC is compared to other competing materials. Finally, several high heat flux applications in the areas of optics, semiconductor processing and wear parts are discussed.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jitendra Singh Goela, Jitendra Singh Goela, Michael A. Pickering, Michael A. Pickering, Lee E. Burns, Lee E. Burns, } "Chemical-vapor-deposited SiC for high heat flux applications", Proc. SPIE 2855, High Heat Flux Engineering III, (21 November 1996); doi: 10.1117/12.259820; https://doi.org/10.1117/12.259820

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