PROCEEDINGS VOLUME 2858
SPIE'S 1996 INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION | 4-9 AUGUST 1996
Charged-Particle Optics II
Editor(s): Eric Munro
SPIE'S 1996 INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION
4-9 August 1996
Denver, CO, United States
Electron Guns and Space Charge
Proc. SPIE 2858, 100-kV electron gun for the x-ray mask writer EB-X2, 0000 (25 October 1996); https://doi.org/10.1117/12.255500
Proc. SPIE 2858, Quasi-conformal finite-element mesh generation for electron gun simulation, 0000 (25 October 1996); https://doi.org/10.1117/12.255508
Electron Lenses and Deflectors: Analysis and Design
Proc. SPIE 2858, Use of the first-order FEM for the computation of magnetic electron lenses, 0000 (25 October 1996); https://doi.org/10.1117/12.255511
Proc. SPIE 2858, Optical properties of immersion objective lenses and collimation of secondary electrons in low-voltage SEM, 0000 (25 October 1996); https://doi.org/10.1117/12.255512
Proc. SPIE 2858, Accurate computation of higher multipole components of electrostatic and magnetic deflectors with the first-order FEM, 0000 (25 October 1996); https://doi.org/10.1117/12.255513
Proc. SPIE 2858, Field function evaluation techniques for electron lenses and deflectors, 0000 (25 October 1996); https://doi.org/10.1117/12.255514
Proc. SPIE 2858, Achromatic deflection system, 0000 (25 October 1996); https://doi.org/10.1117/12.255515
Numerical Simulation and Design Techniques
Proc. SPIE 2858, Interactive design of multicomponent systems, 0000 (25 October 1996); https://doi.org/10.1117/12.255501
Proc. SPIE 2858, Improved 3D boundary charge method, 0000 (25 October 1996); https://doi.org/10.1117/12.255502
Proc. SPIE 2858, High-order interpolation methods for finite-element solved potential distributions in the two-dimensional rectilinear coordinate system, 0000 (25 October 1996); https://doi.org/10.1117/12.255503
Proc. SPIE 2858, Perturbation methods in field and transfer matrix calculation: an extension of analytical methods in electron optics, 0000 (25 October 1996); https://doi.org/10.1117/12.255504
Electron- and Ion-Beam Lithography, Inspection, and Applications
Proc. SPIE 2858, Improved resolution in field-emission lithography machines, 0000 (25 October 1996); https://doi.org/10.1117/12.255505
Proc. SPIE 2858, Electronic image adjustment device for e-beam lithography, 0000 (25 October 1996); https://doi.org/10.1117/12.255506
Proc. SPIE 2858, Influence of aperture position in focused ion-beam systems on statistical Coulomb interaction effects, 0000 (25 October 1996); https://doi.org/10.1117/12.255507
Electron Guns and Space Charge
Proc. SPIE 2858, Numerical analysis of pencils of rays in a point cathode thermionic emission gun, 0000 (25 October 1996); https://doi.org/10.1117/12.255509
Numerical Simulation and Design Techniques
Proc. SPIE 2858, New theoretical approach to the self-coordinated problem in charged-particle optics, 0000 (25 October 1996); https://doi.org/10.1117/12.255510
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