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Optical properties of immersion objective lenses and collimation of secondary electrons in low-voltage SEM
Accurate computation of higher multipole components of electrostatic and magnetic deflectors with the first-order FEM
High-order interpolation methods for finite-element solved potential distributions in the two-dimensional rectilinear coordinate system
Perturbation methods in field and transfer matrix calculation: an extension of analytical methods in electron optics
Influence of aperture position in focused ion-beam systems on statistical Coulomb interaction effects