17 July 1996 Improved signal processing method for heterodyne interferometer
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On the basis of the combination of phase measurement and integer periodic phase measurement, a signal processing scheme, which is used for optical heterodyne interferometer with large range, is described. It not only maintains the high measuring resolution , but also enlarges the measuring range, with solving the problem of large range and measurement of dynamic displacement.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hongzhi Zhao, Yang Zhao, "Improved signal processing method for heterodyne interferometer", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276329; https://doi.org/10.1117/12.276329

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