17 July 1996 Improved signal processing method for heterodyne interferometer
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Abstract
On the basis of the combination of phase measurement and integer periodic phase measurement, a signal processing scheme, which is used for optical heterodyne interferometer with large range, is described. It not only maintains the high measuring resolution , but also enlarges the measuring range, with solving the problem of large range and measurement of dynamic displacement.
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Hongzhi Zhao, Yang Zhao, "Improved signal processing method for heterodyne interferometer", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276329; https://doi.org/10.1117/12.276329
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