Optical flat surfaces: subtraction of small-scale irregularities of the reference surface

Parameswaran Hariharan; Mark A. Suchting

doi:10.1117/12.276319

17 July 1996 Optical flat surfaces: subtraction of small-scale irregularities of the reference surface

Parameswaran Hariharan, Mark A. Suchting

Proceedings Volume 2860, Laser Interferometry VIII: Techniques and Analysis; (1996) https://doi.org/10.1117/12.276319
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

A simple method which can be used to map the small-scale irregularities of the reference surface in an interferometer is described. This reference data set can be stored and subtracted from interferograms recorded subsequently with any test surface to evaluate the small-scale irregularities of the test surface.

Citation Download Citation

Parameswaran Hariharan and Mark A. Suchting "Optical flat surfaces: subtraction of small-scale irregularities of the reference surface", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); https://doi.org/10.1117/12.276319

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available