17 July 1996 Spatially frequency-multiplexed number-theoretic phase unwrapping technique for the Fourier-transform profilometry of objects with height discontinuities and/or spatial isolations
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Abstract
To enhance the performance of the Fourier-transform profilometry, a phase unwrapping technique is proposed which is based on the number theory combined with spatial frequency multiplexing. The technique enables the automatic three-dimensional shape measurement of the objects that have discontinuous height steps and/or spatially isolated surfaces, which has not been possible by conventional fringe projection techniques. Another feature of the technique is that it requires only a single fringe pattern, which makes possible the measurement of objects in very fast motion. Experimental results are presented that demonstrate the validity of the principle. Keywords: phase unwrapping, profilometry, fringe analysis, optical metrology, heterodyne interferometry, Fourier transform
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Mitsuo Takeda, Mitsuo Takeda, Quan Gu, Quan Gu, Masaya Kinoshita, Masaya Kinoshita, Hideaki Takai, Hideaki Takai, Yousuke Takahashi, Yousuke Takahashi, } "Spatially frequency-multiplexed number-theoretic phase unwrapping technique for the Fourier-transform profilometry of objects with height discontinuities and/or spatial isolations", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276333; https://doi.org/10.1117/12.276333
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