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19 July 1996 High-sensitivity displacement measurement using a novel fiber optic electronically scanned white light interferometer
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Abstract
In recent years, white-light interferometry has been used extensively for the measurement of displacement. In this work, a novel bulk-optical Mach-Zehnder interferometer (MZI) is employed as a processing interferometer in an extrinsic fiber-optic electronically scanned white light interferometer. A Fabry-Perot interferometer was used as the sensing interferometer, whereby one of its mirrors was translated using a linear PZT stage in order to provide the displacement measurand. An electronically-scanned system was employed, which has the advantages of not requiring any moving parts, which in turn increases the mechanical stability of the system. In addition, this bulk-optical MZI configuration has the advantages of being relatively small and compact, and does not require the use of polarizers, unlike some electronically-scanned interferometers--such as Wollaston interferometer. This system has been experimentally realized to provide absolute displacement measurements with a resolution of 40 nm.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Raymond H. Marshall, Yanong N. Ning, Andrew W. Palmer, and Kenneth T. V. Grattan "High-sensitivity displacement measurement using a novel fiber optic electronically scanned white light interferometer", Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); https://doi.org/10.1117/12.245183
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