19 July 1996 In-process laser diode heterodyne profilometer with moving-coil objective lens
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This paper describes an high precision in-process optical surface profilometer system. The measurement principle of the profilometer is based on phase comparison of optical heterodyne signals. Disturbance from environment vibration and mechanical instability of the interferometer was effectively eliminated by using optical and electronic common-mode rejection techniques. Measuring light can be automatically focused on the surface by a moving-coil lens during the sample scanning process. The size of the profilometer is small since a laser diode is used instead of a big He-Ne laser. This profilometer is suitable for use on machine. The height sensitivity is of the order of 1 nm and lateral resolution is 0.8 micrometers .
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yongjun Wu, Yongjun Wu, Dacheng Li, Dacheng Li, Mang Cao, Mang Cao, Yuechuan Lu, Yuechuan Lu, } "In-process laser diode heterodyne profilometer with moving-coil objective lens", Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); doi: 10.1117/12.245175; https://doi.org/10.1117/12.245175

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