19 July 1996 In-process laser diode heterodyne profilometer with moving-coil objective lens
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Abstract
This paper describes an high precision in-process optical surface profilometer system. The measurement principle of the profilometer is based on phase comparison of optical heterodyne signals. Disturbance from environment vibration and mechanical instability of the interferometer was effectively eliminated by using optical and electronic common-mode rejection techniques. Measuring light can be automatically focused on the surface by a moving-coil lens during the sample scanning process. The size of the profilometer is small since a laser diode is used instead of a big He-Ne laser. This profilometer is suitable for use on machine. The height sensitivity is of the order of 1 nm and lateral resolution is 0.8 micrometers .
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Yongjun Wu, Dacheng Li, Mang Cao, Yuechuan Lu, "In-process laser diode heterodyne profilometer with moving-coil objective lens", Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); doi: 10.1117/12.245175; https://doi.org/10.1117/12.245175
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