19 July 1996 Phase-shifting techniques applied to unique applications
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Abstract
The methods of phase shifting interferometry have been applied to a number of unique optical metrology instruments which demonstrates the power of phase detection.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chris L. Koliopoulos, Chris L. Koliopoulos, } "Phase-shifting techniques applied to unique applications", Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); doi: 10.1117/12.245154; https://doi.org/10.1117/12.245154
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