In this paper, an instrument for measuring flatness derivation by using an aligned laser beam and CCD detector is described. A stable aligned laser beam is used to form a datum plane in the instrument by rotating shaft and a pentagonal prism. Using a linear array CCD detector as the sensing probe, the system can detect the deviation of height related to the datum plane directly and absolutely. The experiment result shows that the measurement accuracy ofthe instrument is 2.3x r6. Keyword: Flatness, Laser beam, CCD detector
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qun Hao, Qun Hao, Mang Cao, Mang Cao, Dacheng Li, Dacheng Li, } "Instrument for measuring flatness by using laser and CCD", Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); doi: 10.1117/12.256203; https://doi.org/10.1117/12.256203

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