Method to improve the accuracy of super-smooth surface scatter data

Yoshitate Takakura; Mohamed Tahar Sehili; Patrick Meyrueis

doi:10.1117/12.256207

4 November 1996 Method to improve the accuracy of super-smooth surface scatter data

Yoshitate Takakura, Mohamed Tahar Sehili, Patrick Meyrueis

Proceedings Volume 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1996) https://doi.org/10.1117/12.256207
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

An approach to increase the signal-to-noise ratio of the scatter data (hence its accuracy) when studying super-smooth surfaces is proposed. It consists of increasing the power of the illuminating source. Since stray scattering is no longer negligible in such an operation, a solution to alter the instrument signature is given. To prove their stability, the cross section data from a silicon carbide mirror are used in a singular manner to extract roughness parameters mainly the root mean square roughness and the correlation length. Results are satisfactory as they feature low dispersion and are consistent with the approximation used.

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Yoshitate Takakura, Mohamed Tahar Sehili, and Patrick Meyrueis "Method to improve the accuracy of super-smooth surface scatter data", Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); https://doi.org/10.1117/12.256207

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KEYWORDS

Scattering

Silicon carbide

Polarization

Laser scattering

Mirrors

Sensors

Signal to noise ratio

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