4 November 1996 Requirements and suggestions for an industrial smooth surface microroughness standards
Author Affiliations +
Abstract
A number of physical standards are available for the measurement of surface roughness, but none of them are applicable to use with the very smooth surfaces being manufactured in the semiconductor, computer disk and flat panel display industries. This paper reviews some of the issues and suggests possible approaches for realizing such standards. Suggestions include grating like surfaces, very square steps and isotropic (polished) silicon.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John C. Stover, John C. Stover, } "Requirements and suggestions for an industrial smooth surface microroughness standards", Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); doi: 10.1117/12.256192; https://doi.org/10.1117/12.256192
PROCEEDINGS
9 PAGES


SHARE
Back to Top