Investigation of superthin carbon layers and multilayer carbon structures by x-ray reflectivity measurements

Alexander M. Baranov; Sergei A. Tereshin; Igor Fedorovich Mikhailov; V. I. Pinegin

doi:10.1117/12.256242

1 November 1996 Investigation of superthin carbon layers and multilayer carbon structures by x-ray reflectivity measurements

Alexander M. Baranov, Sergei A. Tereshin, Igor Fedorovich Mikhailov, V. I. Pinegin

Author Affiliations +

Proceedings Volume 2863, Current Developments in Optical Design and Engineering VI; (1996) https://doi.org/10.1117/12.256242
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

In situ x-ray monitoring of reflectivity in the short range 0.05 - 0.3 nm for investigation of thin carbon layers and multilayer carbon structures is proposed. X-ray monitoring is based on periodical alternations of Fresnel's reflectivity when layer thickness increases or decreases. The source of x rays with wavelength 0.154 nm was located out of working volume of installation and consisted of x-ray tube, monochromator block and collimating system. The objects of in-situ investigations were carbon films obtained by rf-plasma discharge and magnetron methods. Multilayer carbon structures were synthesized by alternating these layers. Density and microroughness of the growing film were determined for every half-wave of reflectivity oscillations that corresponds to averaging by the layer of 1.0 nm thickness. It is shown that x-ray monitoring system permits the user to control the layers thickness during multilayer structure growth with precision up to 0.1 nm.

Citation Download Citation

Alexander M. Baranov, Sergei A. Tereshin, Igor Fedorovich Mikhailov, and V. I. Pinegin "Investigation of superthin carbon layers and multilayer carbon structures by x-ray reflectivity measurements", Proc. SPIE 2863, Current Developments in Optical Design and Engineering VI, (1 November 1996); https://doi.org/10.1117/12.256242

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available