20 November 1996 Linearity of capacitance micrometry
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Abstract
Capacitance micrometry is a technique for measuring the relative displacement of two surfaces. As the spacing between the two surfaces changes so the capacitance changes. This short paper is a summary of recent measurements made to characterize and understand the linearity and scale factor.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Malachy McConnell, Thomas R. Hicks, Paul D. Atherton, "Linearity of capacitance micrometry", Proc. SPIE 2865, Actuator Technology and Applications, (20 November 1996); doi: 10.1117/12.259036; https://doi.org/10.1117/12.259036
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