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20 November 1996 Linearity of capacitance micrometry
Malachy McConnell; Thomas R. Hicks; Paul D. Atherton
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Proceedings Volume 2865, Actuator Technology and Applications; (1996) https://doi.org/10.1117/12.259036
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States
Abstract
Capacitance micrometry is a technique for measuring the relative displacement of two surfaces. As the spacing between the two surfaces changes so the capacitance changes. This short paper is a summary of recent measurements made to characterize and understand the linearity and scale factor.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Malachy McConnell, Malachy McConnell, Thomas R. Hicks, Thomas R. Hicks, Paul D. Atherton, Paul D. Atherton, } "Linearity of capacitance micrometry", Proc. SPIE 2865, Actuator Technology and Applications, (20 November 1996); doi: 10.1117/12.259036; https://doi.org/10.1117/12.259036
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