16 August 1996 Retardation-modulated differential interference microscope and its application to 3D shape measurement
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Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246219
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan
Abstract
The retardation modulated DIC is proposed for extracting phase information from a DIC image by analyzing the partial coherent theory, which is applied to DIC image enhancement and phase information extraction.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroshi Ishiwata, Hiroshi Ishiwata, Masahide Itoh, Masahide Itoh, Toyohiko Yatagai, Toyohiko Yatagai, } "Retardation-modulated differential interference microscope and its application to 3D shape measurement", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); doi: 10.1117/12.246219; https://doi.org/10.1117/12.246219
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