PROCEEDINGS VOLUME 2876
MICROELECTRONIC MANUFACTURING 1996 | 16-18 OCTOBER 1996
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
Editor(s): Armando Iturralde, Te-Hua Lin
Editor Affiliations +
MICROELECTRONIC MANUFACTURING 1996
16-18 October 1996
Austin, TX, United States
Advanced Process Controls in Integrated Circuit Manufacturing
Rudolf Berger, Claus Schneider, Wolfgang Lehnert, Lothar Pfitzner, Heiner Ryssel
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250893
Tze-Yiu Yong, Jon Wang
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250903
Diane Michelson
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250911
Yi-Chuan Lo, Chih-Hsiung Lee, Chuan-Chieh A. Lin, Chi-Ming Yang, Chuan-Chang Lin, Kuo-Liang Lu, J. J. Yang
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250913
Javier Bonal, Luis Rios, Carlos Ortega, Santiago Aparicio, Manuel Fernandez, Maria Rosendo, Alejandro Sanchez, Sergio Malvar
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250914
Jia Zhen Zheng, Denise Tan, Peter Chew, Lap Hung Chan
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250915
Alain B. Charles, Yves Chandon, Francois Bergeret, Les Garcia
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250916
Yakh'ya V. Fattakhov, Mansur F. Galyautdinov, Tat'yana N. L'vova, Il'dus B. Khaibullin
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250917
Advanced Equipment Controls in Integrated Circuit Manufacturing
Michael D. Baker, Oliver Brand, Mark G. Allen, Gary Stephen May
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250918
Huitzu Lin, Sheng-Cha Lee, Hsien-Wien Chang
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250894
Emiliano Girolami, Maurizio Mazzer
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250895
Michael J. D'Elia, Ted F. Alfonso
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250896
Elizabeth E. Chain, Mark D. Griswold
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250897
B. P. Nagi Reddy, P. N. Reddy, S. V. Pandu Rangaiah
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250898
Advanced Materials Controls in Integrated Circuit Manufacturing
Jerzy Ruzyllo, P. Roman, J. Staffa, Ismail Kashkoush, Emil Kamieniecki
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250899
Walter H. Johnson Sr., Le Nguyen, Robert W. Schanzer, Tim Campbell, Jim White
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250900
Yuri N. Pchelnikov, Andrey A. Yelizarov
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250901
Galen D. Halverson, M. Guyene Hamilton
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250902
Steven T. Mandraccia, Galen D. Halverson, Youn-Min Chou
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250904
Poster Session
Judith B. Barker
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250905
Elizabeth E. Chain, Martin G. Ridens, James P. Annand
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250906
Jeng-Hong Chen, C. Y. Wang
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250907
Anda McAfee, Mercedes Jacobs, Robert Hiatt
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250908
Karl Huber, Tim DeSanti, Steve Felker
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250909
Elizabeth E. Chain, Loma Kulkens, Thomas A. Harris
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250910
Plenary Paper
Doron Meyersdorf
Proceedings Volume Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (1996) https://doi.org/10.1117/12.250912
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