Paper
13 September 1996 Control chart design strategies for skewed data
Steven T. Mandraccia, Galen D. Halverson, Youn-Min Chou
Author Affiliations +
Abstract
Individual measurements and moving-range control charts are applied when the quality characteristic follows a normal distribution. In the semiconductor industry, certain quality characteristics are monitored where the data do not follow a normal distribution. In this paper we consider alternative design strategies for control charts where the distribution of the data is skewed. Although we use skewed data, these techniques are also applicable to other non-normally distributed data. We discuss using a 'state of the art' curve-fitting method, data transformations, and nonsymmetrical limits for the control charting of skewed data. This paper provides alternatives for the design, implementation, and maintenance of process control for non- normal or skewed data.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven T. Mandraccia, Galen D. Halverson, and Youn-Min Chou "Control chart design strategies for skewed data", Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); https://doi.org/10.1117/12.250904
Lens.org Logo
CITATIONS
Cited by 3 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Particles

Semiconducting wafers

Statistical analysis

Process control

Stereolithography

Control systems

Semiconductors

Back to Top