Nondestructive testing of semiconductors and thin coatings

Yuri N. Pchelnikov; Andrey A. Yelizarov

doi:10.1117/12.250901

13 September 1996 Nondestructive testing of semiconductors and thin coatings

Yuri N. Pchelnikov; Andrey A. Yelizarov;

Author Affiliations +

Proceedings Volume 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II; (1996) https://doi.org/10.1117/12.250901
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

The paper presents new measuring technology based on slow- wave structures (SWS) application. It shows peculiarities and advantages of sensors on SWS. The method is based on the interaction between the electromagnetic wave exited in SWS and the object to be checked up. It deals as well with a transducer for non-contact measurements of surface conductivity and thickness of thin films and conductive layers on dielectric or semiconductor substrates. It shows perspectives of designing other transducers on SWS for measuring different physical parameters.

Citation Download Citation

Yuri N. Pchelnikov, Andrey A. Yelizarov, "Nondestructive testing of semiconductors and thin coatings", Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); doi: 10.1117/12.250901; https://doi.org/10.1117/12.250901

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