13 September 1996 Nondestructive testing of semiconductors and thin coatings
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Abstract
The paper presents new measuring technology based on slow- wave structures (SWS) application. It shows peculiarities and advantages of sensors on SWS. The method is based on the interaction between the electromagnetic wave exited in SWS and the object to be checked up. It deals as well with a transducer for non-contact measurements of surface conductivity and thickness of thin films and conductive layers on dielectric or semiconductor substrates. It shows perspectives of designing other transducers on SWS for measuring different physical parameters.
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Yuri N. Pchelnikov, Yuri N. Pchelnikov, Andrey A. Yelizarov, Andrey A. Yelizarov, } "Nondestructive testing of semiconductors and thin coatings", Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); doi: 10.1117/12.250901; https://doi.org/10.1117/12.250901
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