Yield effects of interactions between high polymer forming metal etch processes and postetch ash processes

Tze-Yiu Yong; Jon Wang

doi:10.1117/12.250903

13 September 1996 Yield effects of interactions between high polymer forming metal etch processes and postetch ash processes

Tze-Yiu Yong, Jon Wang

Author Affiliations +

Proceedings Volume 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II; (1996) https://doi.org/10.1117/12.250903
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

We have demonstrated a correlation between post-metal etch ashrate performance and yield on CMOS technology integrated circuit (IC) product wafers etched at metal etch with high polymer producing recipes. This paper presents details of high polymer forming metal etch processes and two novel techniques developed for quantifying the amount of polymer formed during etch. Data are presented which illustrate a correlation between electrical test yield, post metal etch ashrates and the amount of polymer formed during the etch. Finally, recognizing that the metal etch recipe/ashrate correlation does not explain all forms of yield loss due to leakage, we suggest other areas for investigation.

Citation Download Citation

Tze-Yiu Yong and Jon Wang "Yield effects of interactions between high polymer forming metal etch processes and postetch ash processes", Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); https://doi.org/10.1117/12.250903

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available