13 September 1996 Implementing surface photo-voltage in manufacturing
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Abstract
The acquisition of surface photo-voltage (SPV) instrument is only one step in the implementation of a metallic contamination reduction program. In order to take manufacturing decisions based on surface photo-voltage data, one must understand the strengths and limitations of the technique and avoid its pitfalls. We review the steps taken to implement SPV in our fab.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Martine Simard-Normandin, "Implementing surface photo-voltage in manufacturing", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); doi: 10.1117/12.250932; https://doi.org/10.1117/12.250932
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