Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films

Valerie A. Ligachov; Anatolyi I. Popov; Sergei N. Stuokach

doi:10.1117/12.250939

13 September 1996 Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films

Valerie A. Ligachov, Anatolyi I. Popov, Sergei N. Stuokach

Proceedings Volume 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III; (1996) https://doi.org/10.1117/12.250939
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

The following paper presents the results of morphology (columnar structure) and properties investigations of 0.2 - 0.4 mkm thick amorphous hydrogenated carbon (C:H) films, prepared by radio frequency (rf) sputtering of graphite target in argon-hydrogen mixture.

Citation Download Citation

Valerie A. Ligachov, Anatolyi I. Popov, and Sergei N. Stuokach "Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); https://doi.org/10.1117/12.250939

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