13 September 1996 Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films
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Abstract
The following paper presents the results of morphology (columnar structure) and properties investigations of 0.2 - 0.4 mkm thick amorphous hydrogenated carbon (C:H) films, prepared by radio frequency (rf) sputtering of graphite target in argon-hydrogen mixture.
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Valerie A. Ligachov, Valerie A. Ligachov, Anatolyi I. Popov, Anatolyi I. Popov, Sergei N. Stuokach, Sergei N. Stuokach, } "Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); doi: 10.1117/12.250939; https://doi.org/10.1117/12.250939
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