13 September 1996 Novel double-focus interferometer for scanning force microscope
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Abstract
A novel double focus optical interferometer for scanning force microscope is presented in this paper. The deflection of the force sensing cantilever is measured by detecting the phase shift of two orthogonal polarized light beams reflected from the end of the cantilever and a reference plane with a hole in the center. We have tested some samples by using this instrument and gotten some high resolution pictures. The instrument provides 0.1 nm height resolution and 5 nm lateral resolution and is especially applicable in the profilometer of the integral circuit, fine grate, etc.
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Yongmo Zhuo, Yongmo Zhuo, Xu-Dong Mou, Xu-Dong Mou, Yongying Yang, Yongying Yang, Bin Cao, Bin Cao, } "Novel double-focus interferometer for scanning force microscope", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); doi: 10.1117/12.250926; https://doi.org/10.1117/12.250926
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