Visit My Account to manage your email alerts.
Influence of gas composition and the mask materials on the etch profile of dry-etched structures in silicon
Characterization of membrane curvature in micromachined silicon accelerometers and gyroscopes using optical interferometry
Simple technology for fabricating micromechanical 3D structures using electroplating without photoresist mold
Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures
Aluminum passivation in saturated TMAHW solutions for IC-compatible microstructures and device isolation
Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS
Assembly and interconnection technology for micromechanical structures using anisotropic conductive film