23 September 1996 Fabrication and performance of MARS optical modulators for fiber-to-the-home systems
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Proceedings Volume 2879, Micromachining and Microfabrication Process Technology II; (1996) https://doi.org/10.1117/12.251217
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
Abstract
The methods used to fabricate silicon optical modulators (MARS) devices in several material systems are described. Experimental results showing low bit-error-rate performance at 3.5 Mbit/sec. with a broad optical spectrum are presented.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James A. Walker, James A. Walker, Keith W. Goossen, Keith W. Goossen, } "Fabrication and performance of MARS optical modulators for fiber-to-the-home systems", Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); doi: 10.1117/12.251217; https://doi.org/10.1117/12.251217
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