23 September 1996 Fabrication of LIGA mold inserts using a modified procedure
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Proceedings Volume 2879, Micromachining and Microfabrication Process Technology II; (1996); doi: 10.1117/12.251204
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
Abstract
The LIGA process, invented in Germany and being further developed at Louisiana State University can be used to economically mass produce high aspect ratio microstructures (HARM) by molding. The template, or mold insert, is required to mold microstructure and is fabricated by a two step sequence of x-ray lithography and electroplating. A modified version of the LIGA process has been used to produce a mold insert. A sheet of PMMA is first patterned using x-ray lithography. After the lithography process is completed, the PMMA sheet is clamped to a nickel substrate and a subsequent electroplating step produces a mold insert. This processing sequence eliminates the need to establish a chemical bond between the resist and the substrate. The electroplated HARM were used as a mold insert in subsequent molding experiments. One mold insert which was fabricated is presented, along with the results of molding experiments using a similar insert.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vikas Galhotra, Christophe Marques, Yohannes M. Desta, Kevin W. Kelly, Mircea S. Despa, Ajit Pendse, John R. Collier, "Fabrication of LIGA mold inserts using a modified procedure", Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); doi: 10.1117/12.251204; https://doi.org/10.1117/12.251204
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KEYWORDS
Polymethylmethacrylate

Nickel

Electroplating

X-ray lithography

Polymers

Lithography

Electrodes

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