Silicon-micromachined poppet valve with an octagonal diaphragm

James W Siekkinen; K. J. Haltiner; Dan W. Chilcott; L. X. Huang; Steve E. Staller

doi:10.1117/12.251209

23 September 1996 Silicon-micromachined poppet valve with an octagonal diaphragm

James W Siekkinen; K. J. Haltiner; Dan W. Chilcott; L. X. Huang; Steve E. Staller

Author Affiliations +

Proceedings Volume 2879, Micromachining and Microfabrication Process Technology II; (1996) https://doi.org/10.1117/12.251209
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

A new pressure-activated silicon micromachined poppet valve design and fabrication process are presented for automotive fuel applications. Although non-electrically activated, micromachining provides a physical structure which is difficult or expensive to achieve with conventional method machined parts. Bulk etching is used to fabricate an octagonal silicon diaphragm which moves in response to the inlet fluid pressure. Silicon direct bonding is used to combine two layers, one with an inlet flow chamber and valve boss, and a second with a movable diaphragm and valve seat. The outlet side of the diaphragm includes a spring locator to position a counter-force mechanical spring. The diaphragm's burst pressure is reduced and varies greatly depending on the alignment of the clamping edges above and below the diaphragm.

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James W Siekkinen, James W Siekkinen, K. J. Haltiner, K. J. Haltiner, Dan W. Chilcott, Dan W. Chilcott, L. X. Huang, L. X. Huang, Steve E. Staller, Steve E. Staller, } "Silicon-micromachined poppet valve with an octagonal diaphragm", Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); doi: 10.1117/12.251209; https://doi.org/10.1117/12.251209

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