23 September 1996 Silicon micromachining technologies: future needs and challenges
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Proceedings Volume 2879, Micromachining and Microfabrication Process Technology II; (1996) https://doi.org/10.1117/12.251208
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
This paper reviews recent developments in micromachining technologies for the fabrication of microsensors, microactuators, and integrated microsystems, and discusses the requirements that micromachining technologies have to satisfy for many present and emerging applications. First, the paper discusses the challenges that micromachining technologies have to overcome and features that they have to provide for many future applications. Micromachining technologies have to be simple so that high yield and low cost can be achieved in manufacturing , they have to be capable of producing microstructures with a variety of shapes and sizes in all three dimensions, many of them have to be compatible with integration with electronics, they have to be capable of providing packaging and encapsulation at the wafer level for many devices that require operation in hermetic and/or vacuum environments, and finally they have to be capable of supporting a mixed set of materials, technologies and devices. Significant progress has been made in all of these areas during the past few years and several groups have developed new techniques that satisfy some or all of these requirements. The paper also reviews the most recent advances in the three mainstream technologies of bulk silicon micromachining, surface micromachining, and electroplating techniques. As microsystems become more complex, these three mainstream technologies will be increasingly used and combined to build complex systems at low cost.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Khalil Najafi, Khalil Najafi, } "Silicon micromachining technologies: future needs and challenges", Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); doi: 10.1117/12.251208; https://doi.org/10.1117/12.251208


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