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Investigation on the frequency response characteristics of an instrument for laser vibrometry and laser displacementmetry
Lateral force microscopy using cantilevers with integrated Wheatstone bridge piezoresistive deflection sensor
Cantilever with integrated Wheatstone bridge piezoresistive deflection sensor: analysis of force interaction measurement sensitivity
Application of micromachining technology to optical devices and systems (Same as Vols. 2881 and 2882, p. 2)