13 September 1996 Analysis of fixed-fixed beam test structures
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Proceedings Volume 2880, Microlithography and Metrology in Micromachining II; (1996) https://doi.org/10.1117/12.250961
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
This paper presents recent NIST MicroElectroMechanical Systems fixed-fixed beam test structure data and analysis. These test structures show the most promise in measuring the compressive strain due to simplicity of the test structure design, simplicity of test and analysis, ability to better isolate compressive strain values as a function of geometry, and, most importantly, capability to record process variability data.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Janet C. Marshall, Janet C. Marshall, David T. Read, David T. Read, Michael Gaitan, Michael Gaitan, } "Analysis of fixed-fixed beam test structures", Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); doi: 10.1117/12.250961; https://doi.org/10.1117/12.250961

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