Paper
13 September 1996 Commercializing MEMS--too fast or too slow? (Same as Vols. 2881 and 2882, p. 12)
S. Walsh, W. N. Carr, H. Mados, D. S. Narang
Author Affiliations +
Proceedings Volume 2880, Microlithography and Metrology in Micromachining II; (1996) https://doi.org/10.1117/12.250966
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
Abstract
MEMS as a technology base is coming of age, but as in any vital process growing pains occur. Commercializing MEMS is simultaneously viewed as agonizingly slow by many of its promoters and lightingly quick by many companies whose products are being replaced with MEMS based substitutes. This effort ties current efforts in market analysis, technology evaluations, competency based strategy in an effort to understand the pace of MEMS commercialization.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Walsh, W. N. Carr, H. Mados, and D. S. Narang "Commercializing MEMS--too fast or too slow? (Same as Vols. 2881 and 2882, p. 12)", Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); https://doi.org/10.1117/12.250966
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Cited by 2 scholarly publications.
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KEYWORDS
Microelectromechanical systems

Manufacturing

Semiconductors

Defense and security

Consumer electronics

Deep ultraviolet

Explosives

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