13 September 1996 LIGA-based family of tips for scanning probe applications
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Proceedings Volume 2880, Microlithography and Metrology in Micromachining II; (1996) https://doi.org/10.1117/12.250951
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
Abstract
A LIGA based tool-set of tips for various scanning probe applications is under investigation by the LSU (mu) SET. This involves fabrication of `micro-columns' using LIGA, followed by an electrochemical sharpening process. Micro-columns ranging from 1.8 micrometers diameter and 14 micrometers tall to 165 micrometers X 165 micrometers and 1000 micrometers tall have been fabricated. In order to understand the sharpening mechanism, commercially available wires with diameters ranging from 25 - 800 micrometers were sharpened. A computer aided design tool, based on deforming finite elements, was developed to simulate the sharpening process.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sandeep Akkaraju, Yohannes M. Desta, BenQiang Li, Michael C. Murphy, Olga Vladimirsky, Yuli Vladimirsky, "LIGA-based family of tips for scanning probe applications", Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); doi: 10.1117/12.250951; https://doi.org/10.1117/12.250951
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