13 September 1996 LIGA-based family of tips for scanning probe applications
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Proceedings Volume 2880, Microlithography and Metrology in Micromachining II; (1996) https://doi.org/10.1117/12.250951
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
A LIGA based tool-set of tips for various scanning probe applications is under investigation by the LSU (mu) SET. This involves fabrication of `micro-columns' using LIGA, followed by an electrochemical sharpening process. Micro-columns ranging from 1.8 micrometers diameter and 14 micrometers tall to 165 micrometers X 165 micrometers and 1000 micrometers tall have been fabricated. In order to understand the sharpening mechanism, commercially available wires with diameters ranging from 25 - 800 micrometers were sharpened. A computer aided design tool, based on deforming finite elements, was developed to simulate the sharpening process.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sandeep Akkaraju, Sandeep Akkaraju, Yohannes M. Desta, Yohannes M. Desta, BenQiang Li, BenQiang Li, Michael C. Murphy, Michael C. Murphy, Olga Vladimirsky, Olga Vladimirsky, Yuli Vladimirsky, Yuli Vladimirsky, "LIGA-based family of tips for scanning probe applications", Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); doi: 10.1117/12.250951; https://doi.org/10.1117/12.250951

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