23 September 1996 Micromirrors with single crystal silicon support structures
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Proceedings Volume 2881, Microelectronic Structures and MEMS for Optical Processing II; (1996) https://doi.org/10.1117/12.251256
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
A novel process for fabrication of torsional micro-mirrors with large dimensions (300 X 240 micrometers and 150 X 120 micrometers ) is presented. The mirrors consist of a sputtered aluminum film on a layer of supporting oxide mounted on fully suspended single crystal silicon grids. The grids have an aspect ratio of 7:1 in order to provide a stiff backbone and to ensure flatness of the mirror surface. The mirrors thus do not bend due to the internal stresses. A new idea of actuation of torsional structures is also presented in this paper. Vertical near-comb type actuators were fabricated to drive the torsional structures.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhimin Yao, Zhimin Yao, Stephen W. Tang, Stephen W. Tang, Noel C. MacDonald, Noel C. MacDonald, } "Micromirrors with single crystal silicon support structures", Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); doi: 10.1117/12.251256; https://doi.org/10.1117/12.251256

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