Antenna-coupled rectifying diode for IR detection

Hideaki Yamagishi; Hitoshi Hara; Nobuhiko Kanbara; Yasushi Onoe; Naoki Kishi

doi:10.1117/12.250727

17 September 1996 Antenna-coupled rectifying diode for IR detection

Hideaki Yamagishi, Hitoshi Hara, Nobuhiko Kanbara, Yasushi Onoe, Naoki Kishi

Proceedings Volume 2882, Micromachined Devices and Components II; (1996) https://doi.org/10.1117/12.250727
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

An antenna-coupled rectifying SChottky Barrier DIode (SBD) for IR detection is fabricated on Si by IC processes. Aluminum thin film antenna of 30 micrometers length and 1.5 micrometers width is formed on thermally grown SiO₂ layer on Si. At the end of antenna, rectifying SBD of 0.03 micrometers diameter is formed by focused ion beam (FIB) milling technique. Ion current monitoring system with FIB largely reduced the size of milled hole, which is conventionally limited by ion beam waist diameter. IR radiation from CO₂ laser of 10.6 micrometers in wavelength and 0.55 W in power is used for device evaluations. Signal dependence on incident angle of CO₂ laser radiation and dependence on diode bias voltage are evaluated. We confirmed the rectifying operation of antenna- coupled SBD at IR region and experimentally obtained rectified voltage of 173 nV. The NEP is calculated to be 1.94 X 10^-6 W/Hz^-1/2.

Citation Download Citation

Hideaki Yamagishi, Hitoshi Hara, Nobuhiko Kanbara, Yasushi Onoe, and Naoki Kishi "Antenna-coupled rectifying diode for IR detection", Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); https://doi.org/10.1117/12.250727

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