Force measurements of polysilicon thermal microactuators

J. Robert Reid; Victor M. Bright; John H. Comtois

doi:10.1117/12.250716

17 September 1996 Force measurements of polysilicon thermal microactuators

J. Robert Reid, Victor M. Bright, John H. Comtois

Proceedings Volume 2882, Micromachined Devices and Components II; (1996) https://doi.org/10.1117/12.250716
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

Surface micromachined polycrystalline silicon thermal micro- actuators provide large deflections while requiring low drive voltages and occupying small device areas. The force provided by thermal actuators is not currently known. Therefore, force testers have been designed and fabricated. The force testers were used to measure the force of individual actuators over a range of design parameters including flexure length, hot arm width, arm separation,and actuator thickness. The force testers have also been connected to arrays of 2 to 20 actuators coupled together. Measurements of force tester deflection versus actuator drive power have been taken. The data shows that individual actuators are capable of generating greater than 4.8 micronewtons of force with less than 15 milliwatts of power. The test also show that coupling the actuators together successfully combines the force of individual actuators. These measurements allow the creation of a general set of design rules for efficient thermal actuators.

Citation Download Citation

J. Robert Reid, Victor M. Bright, and John H. Comtois "Force measurements of polysilicon thermal microactuators", Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); https://doi.org/10.1117/12.250716

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available