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17 September 1996 Mercury-contact switching with gap-closing microcantilever
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Proceedings Volume 2882, Micromachined Devices and Components II; (1996) https://doi.org/10.1117/12.250705
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
Abstract
We present an electrostatically actuated micro-mechanical relay with a stationary mercury micro-drop at the point of contact. The moving element is 2 micrometers thick polysilicon cantilever with widths from 2 to 3 micrometers and lengths from 300 to 500 micrometers made through MCNC multi-user MEMS processes. A technique to selectively form microscale mercury on prescribed sites was used to accomplish mercury- to-electrode contacts for the relays. Measurements of the poly-mercury-poly contact resistance resulted in values that range from 800 to 1000 (Omega) , with most values near 1000 (Omega) . The total resistance of the devices varied from 1.9 k(Omega) to 3.2 k(Omega) depending on the device configuration. The device can switch loads over 10 mA.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Scott Saffer, Jonathan Simon, Chang-Jin Kim, Kyung Ho Park, and Jong-Hyun Lee "Mercury-contact switching with gap-closing microcantilever", Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); https://doi.org/10.1117/12.250705
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