Micromachined rotating yaw-rate sensor

Robert B. Yates; Connel B. Williams; Chris Shearwood; Phillip Mellor

doi:10.1117/12.250700

17 September 1996 Micromachined rotating yaw-rate sensor

Robert B. Yates; Connel B. Williams; Chris Shearwood; Phillip Mellor

Author Affiliations +

Proceedings Volume 2882, Micromachined Devices and Components II; (1996) https://doi.org/10.1117/12.250700
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

This paper describes a novel, electromagnetically levitated, micromachined gyroscope or yaw rate sensor. The device uses a rotor spun at high speed and has the potential for several orders of magnitude improvement in yaw rate sensitivity when compared to other micromachined sensors. The first prototype rotates at just over 1,000 revolutions per minute, with a predicted sensitivity of approximately 0.5 degrees per second. The model indicates that this rotation speed may be increased by orders of magnitude, with corresponding increases in the sensitivity, as the speed of rotation is only limited by the drag force in air. The device also has the advantage that it is extremely simple to fabricate.

Citation Download Citation

Robert B. Yates, Robert B. Yates, Connel B. Williams, Connel B. Williams, Chris Shearwood, Chris Shearwood, Phillip Mellor, Phillip Mellor, } "Micromachined rotating yaw-rate sensor", Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250700; https://doi.org/10.1117/12.250700

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