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17 September 1996Micromachined rotating yaw-rate sensor
This paper describes a novel, electromagnetically levitated, micromachined gyroscope or yaw rate sensor. The device uses a rotor spun at high speed and has the potential for several orders of magnitude improvement in yaw rate sensitivity when compared to other micromachined sensors. The first prototype rotates at just over 1,000 revolutions per minute, with a predicted sensitivity of approximately 0.5 degrees per second. The model indicates that this rotation speed may be increased by orders of magnitude, with corresponding increases in the sensitivity, as the speed of rotation is only limited by the drag force in air. The device also has the advantage that it is extremely simple to fabricate.
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Robert B. Yates, Connel B. Williams, Chris Shearwood, Phillip Mellor, "Micromachined rotating yaw-rate sensor," Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); https://doi.org/10.1117/12.250700