Microsystem CAD

Jan G. Korvink; Henry Baltes

doi:10.1117/12.250701

17 September 1996 Microsystem CAD

Jan G. Korvink, Henry Baltes

Proceedings Volume 2882, Micromachined Devices and Components II; (1996) https://doi.org/10.1117/12.250701
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

Microsystem technology, which includes semiconductor technology, together with current design methods determine the user requirements of (mu) TCAD tools aimed at microsystem developers. The choice of numerical methods and computer technology complete the specification. In this paper we present a (mu) TCAD system, and show how it is broken up into tasks, individual programs that make up the functional building blocks. Many of these blocks already exist, organized within the (mu) TCAD system and centered around our microsystem simulation kernel SOLIDIS. We illustrate these functional blocks with concrete examples. We conclude by considering the missing links in the (mu) TCAD chain.

Citation Download Citation

Jan G. Korvink and Henry Baltes "Microsystem CAD", Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); https://doi.org/10.1117/12.250701

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