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17 September 1996 Novel MEMS simulation tool for thermal-based radiation sensors
Nicholas R. Swart, Hubert Jerominek, Philippe Lambert
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Proceedings Volume 2882, Micromachined Devices and Components II; (1996) https://doi.org/10.1117/12.250704
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States
Abstract
We report a simulation tool employing the finite element method for thermal-based radiation sensor analysis. Application of the tool to bolometric detectors is described, and simulation examples are given. Excellent agreement is observed between experimental and measured data. In addition, an equivalent circuit model, with pertinent parameters calculated automatically by the simulation tool, is also presented.
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Nicholas R. Swart, Hubert Jerominek, and Philippe Lambert "Novel MEMS simulation tool for thermal-based radiation sensors", Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); https://doi.org/10.1117/12.250704
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KEYWORDS
Sensors
Microelectromechanical systems
Circuit switching
Device simulation
Finite element methods
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