Pinhole defect detection and printability prediction

Franklin D. Kalk; Anthony Vacca; Peter Radcliff

doi:10.1117/12.262797

27 December 1996 Pinhole defect detection and printability prediction

Franklin D. Kalk, Anthony Vacca, Peter Radcliff

Proceedings Volume 2884, 16th Annual BACUS Symposium on Photomask Technology and Management; (1996) https://doi.org/10.1117/12.262797
Event: 16th Annual BACUS Symposium on Photomask Technology and Management, 1996, Redwood City, CA, United States

Abstract

Photomask defect criteria normally specify pinholes by size, regardless of other factors that may affect printability (e.g., transmission, reflectivity, phase, or proximity to features). This paper is an initial study of the effect of pinhole defect transmission, size, and location on inspection tool sensitivity and defect printability. Two masks with varying defect properties were built, inspected on a mask inspection tool, and exposed on a DUV wafer stepper and an aerial image simulation microscope. On the wafer, defect printability was measured as either the presence of an isolated defect or the variation in line size for a line with a defect in close proximity. A prototype inspection-based tool was used to estimate defect printability, and the results were correlated to on-wafer defect printability. The goal of this work is to find a quantifiable measurable that may be used at inspection review to reliably predict printability.

Citation Download Citation

Franklin D. Kalk, Anthony Vacca, and Peter Radcliff "Pinhole defect detection and printability prediction", Proc. SPIE 2884, 16th Annual BACUS Symposium on Photomask Technology and Management, (27 December 1996); https://doi.org/10.1117/12.262797

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available