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23 September 1996Fabrication of infrared wire grid polarizer by ion beam milling
This paper gives the example of making infrared wire grid polarizer used in 8 to approximately 14 micrometers wave range by ion beam milling. We have measured and calculated the transmissibility and polarizability of the polarizer. The results have been analyzed and compared with those derived from the theory. it is illustrated that we can get uniform and better quality polarizer by using this method.
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Junjie Si, Yonggang Wu, "Fabrication of infrared wire grid polarizer by ion beam milling," Proc. SPIE 2885, Holographic Optical Elements and Displays, (23 September 1996); https://doi.org/10.1117/12.251868